In state-of-the-art nanolithography a mask containing the layout of a computer chip is imaged, using extreme ultraviolet (EUV) light, onto a thin layer of photo-resist on top of a semiconductor wafer from which the computer chips are fabricated. In this summer course we will follow the path that the light in said state-of-the-art nanolithography takes, and also address the challenges of illuminating wafers and precisely monitoring the imprints of nanostructures on the wafers.
They will cover the surprisingly rich physics behind some of the fundamental processes occurring in Nanolithography. These range from the interaction of intense laser light with metals, the generation of plasmas, the generation of EUV light in plasmas, the creation of good mirrors out of badly reflecting materials, (sub-)nm metrology on semiconductor structures and the light sources needed for such metrology.
Course leader
Oscar Versolato and Paul Planken
Target group
This course is suitable for BSc level physics students (being either advanced in their BSc studies or having finished BSc) as well as for more senior, MSc students. Talented post-MSc students are also welcome.
Course aim
By the end of this course, students will be able to:
- Reproduce and apply new, advanced physics concepts from areas relevant in nanolithography such as advanced optics, plasma physics, surface science, high-harmonic generation, and new concepts in metrology.
- Apply and combine basic and advanced physics concepts and new paradigms (e.g. also from BSc courses on solid state physics; atomic, molecular and optical physics) to analyse and solve concrete problems that transcend individual physics domains in state-of-the-art nanolithography, specifically in the nanolithography fields of: Optics for extreme ultraviolet light; Laser-driven plasma light sources; Optical inspection and metrology; Thin films and surfaces and their interactions with light.
- Identify the scientific challenges and fundamental limits faced by physicists performing research in the field of nanolithography
Fee info
EUR 950: Tuition fees two-week course:
VU Students/PhD candidates and employees of VU Amsterdam* or an Aurora Network Partner €650
Students at Partner Universities of VU Amsterdam €900
Students and PhD candidates at non-partner universities of VU Amsterdam €950*
Professionals €1150
For further information, please click the "LINK TO ORIGINAL" button below.